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searching for Shallow trench isolation 5 found (16 total)

alternate case: shallow trench isolation

2002 in Germany (454 words) [view diff] case mismatch in snippet view article find links to article

"Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization". MRS Proceedings. 838. doi:10

NanoAndMore (677 words) [view diff] case mismatch in snippet view article find links to article

"Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization". MRS Proceedings. 838. doi:10

Technology CAD (1,866 words) [view diff] no match in snippet view article find links to article

gives emphasis to Design For Manufacturing (DFM) issues such as: shallow-trench isolation (STI), extra features required for phase-shift masking (PSM) and

MOSFET (11,756 words) [view diff] exact match in snippet view article find links to article

up more space on silicon than a standard MOSFET. In older STI (shallow trench isolation) designs, radiation strikes near the silicon oxide region cause

List of fellows of IEEE Electron Devices Society (69 words) [view diff] exact match in snippet view article find links to article

2016 Chorng-ping Chang For contributions to replacement gate and shallow trench isolation for CMOS technology 2016 Mukta Farooq For contributions to 3D integration