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searching for Off-axis illumination 3 found (6 total)

Optical proximity correction (1,849 words) [view diff] exact match in snippet view article find links to article

the use of OPC does not change the illumination requirement. If off-axis illumination is required, OPC cannot be used to switch to on-axis illumination

Photolithography (6,471 words) [view diff] exact match in snippet view article find links to article

Illumination direction impact. On-axis illumination provides higher contrast, but only off-axis illumination resolves the smallest pitch.

Stepper (3,204 words) [view diff] exact match in snippet view article find links to article

Off-axis illumination as a resolution enabler.